Scientific Publications
15 May, 2024
MEMS-on-CMOS integration of a holographic 8M-Pixel SLM device using KrF-Lithography
15 May, 2024
Characterization of MEMS piston mirror arrays with comb drive actuator
15 May, 2024
Novel reflective SLM in real holographic 3D HUD displays and theirimpact on quality
6 April, 2023
FEM Simulations to optimize a micro mirror array package for a wide operating temperature range
This paper was published at the SPIE Photonics West 2023 on 15th March 2023.
6 April, 2023
Improved comb drive design for MEMS piston mirror arrays
This paper was published at the SPIE Photonics West 2023 on 15th March 2023.
5 April, 2023
Advantages of Phase Modulating MEMS for Full 3D Hologram Scene Reconstruction
This paper was published at the Digital Holography and 3-D Imaging 2022 in August 2022.
6 April, 2022
MEMS Piston Mirror Arrays for Computer Generated Holography
This paper was published at the SPIE Photonics West 2022 on 1st March 2022.
6 April, 2022
Analog Spatial Light Modulators Based on Micromirror Arrays
This paper was published at the Micromachines Journal on 23rd April 2021.
6 April, 2022
Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators
This paper was published at the SPIE Opto 2021 on 5th March 2021.
16 February, 2022
MEMS Spatial Light Modulators for Real Holographic 3D Displays
This paper was published at the MikroSystemTechnik Congress 2021 on 8-10th November 2021.